Characteristics
0.1 μm In-Line Precision
The PULCOM Super Σ achieves repeatability accuracy of 0.1μm (25 times).
Resistant to Temperature Change
The change in the measured value is 0.5μm or less when the ambient temperature varies by 10°C.
Extended Idling Not Required
The change in the measured values 10 minutes after the power is turned on is 0.1μm or less.