Wafer Thickness Measuring Instruments AST

Dedicated Air Servo Type Wafer Thickness Messuring System.

1. Non-contact measurement using air.
2. Can measure glass other than wafers (must be more than 700 μm thick).
3. Wafer-only measurement part available as an option.
4. Measuring range: 8.5mm long stroke.
5. Measurement using manual movement between one center point and four perimeter points.
6. Measurement data can be sent to a PC (option).
7. Easy switching to 8-inch setup by changing a pin position.